Two possible cleaning methods were identified. The first was using laser ablation and the second utilized an alkaline based cleaner and ultrasonics. The ultrasonic cleaning took longer to clean the parts but worked better than the laser ablation. Follow up testing may include baking parts at elevated temperatures before cleaning with the ultrasonics.
Test Objective:
To identify new cleaning process for alumina based ceramic components used in semiconductor industry
To evaluate ultrasonic cleaning on supplied ceramic parts
Results suggest a scale-up feasible match for cleaning chemistry and equipment. Pilot plant study with actual parts recommended.
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Who We Are
The Toxics Use Reduction Institute at the University of Massachusetts Lowell (“TURI”), is a state agency and public institution of higher education, formed under MGL c. 75, and the Toxics Use Reduction Act (“TURA”), MGL c. 21I.
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General
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