CleanerSolutions Database
Toxics Use Reduction Institute · Surface Solutions Laboratory
 
Toxics Use Reduction Institute




Surface Solutions Laboratory

Client Information



Client Number 308 (Electronics Manufacturer)


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Project Number 1



Summary: Two possible cleaning methods were identified. The first was using laser ablation and the second utilized an alkaline based cleaner and ultrasonics. The ultrasonic cleaning took longer to clean the parts but worked better than the laser ablation. Follow up testing may include baking parts at elevated temperatures before cleaning with the ultrasonics.

Test Objective: To identify new cleaning process for alumina based ceramic components used in semiconductor industry

Problems with Current Method: Doesn't result in needed cleanliness levels

Purpose of Cleaning: Remove deposits and oxides from equipment prior to being reused.

Product Use: Part of manufacturing equipment

Trial Number Date Run Purpose Success Rating
0 09/19/08 To screen potential alternative cleaning products Preliminary compatibility tests on substrate coupons encouraging for at least one cleaning chemistry. More in-depth laboratory testing necessary. 
1 10/02/08 To further evaluate baking soda blasting for removing oxides and carbon deposits from ceramic part. A follow up test, usually based on company input. 
2 10/02/08 To evaluate laser ablation cleaning technology for removal of carbon deposits and oxides from ceramic parts. Results suggest a scale-up feasible match for cleaning chemistry and equipment. Pilot plant study with actual parts recommended. 
3 12/09/08 To evaluate ultrasonic cleaning on supplied ceramic parts Results suggest a scale-up feasible match for cleaning chemistry and equipment. Pilot plant study with actual parts recommended.