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Client #167

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Project Number 1

Summary:

Database search was run for lab testing and vendor recommended products.

Test Objective:

No testing requested, recommendation of cleaners desired based on previous testing of similar applications

Product Use:

ultraclean silicon wafer processing
Trial Number Date Run Purpose Success Rating
0 02/11/2002 Identify alternative cleaning products for removing latex adhesive, silicone slurry and silicone oxide from stainless steel parts Technology Transfer.